Effect of RGPP process on properties of Cr-Si-N coatings

CrSiN films were deposited by reactive radio frequency magnetron sputtering in an Ar+N 2 gas mixture. The nitrogen gas was injected in the deposition chamber using two methods: the classical constant injection and pulsed injection, the latter known as the reactive gas pulsing process (RGPP). Argon g...

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Bibliographic Details
Published in:Surface engineering 2014-08, Vol.30 (8), p.606-611
Main Authors: Zairi, A., Nouveau, C., Larbi, A. B. C., Iost, A., Martin, N., Besnard, A.
Format: Article
Language:English
Subjects:
Applied sciences
Chambers
Chemical composition
Chemical Sciences
Clusters
Coatings
Condensed Matter
Constants
Cross-disciplinary physics: materials science
rheology
CrSiN
Crystal structure
Deposition
Engineering Sciences
Exact sciences and technology
Material chemistry
Materials
Materials Science
Metals. Metallurgy
Methods of deposition of films and coatings
film growth and epitaxy
Micro and nanotechnologies
Microelectronics
Morphology
Nitrogen pulsed injection
Physics
Production techniques
rf magnetron sputtering
Surface treatment
Thin films
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Summary:CrSiN films were deposited by reactive radio frequency magnetron sputtering in an Ar+N 2 gas mixture. The nitrogen gas was injected in the deposition chamber using two methods: the classical constant injection and pulsed injection, the latter known as the reactive gas pulsing process (RGPP). Argon gas was continuously injected, whereas nitrogen gas was pulsed during the deposition. The RGPP was used to adjust the chemical composition and, consequently, allowed the improvement of the coating characteristics. The effect of process parameters such as silicon content and gas pulsing conditions (especially duty cycle α) on the crystallographic structure, chemical composition and morphology of the CrSiN layers is reported. It was found that the surface morphology evolves from a pyramid-like feature for 100% duty cycle to a typical cauliflower-like aspect, when duty cycle decreases to 84%. For shorter duty cycles, the growth produced a denser coating, with round and finer clusters.
ISSN:0267-0844
1743-2944
DOI:10.1179/1743294414Y.0000000280