Design and fabrication of a multiple-thickness electrochemical cantilever sensor: Micro/Nano Devices and Systems 2013: An open thematic journal issue

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Bibliographic Details
Published in:Microelectronic engineering 2014, Vol.119, p.1-5
Main Authors: CHANG WU, PETRINI, Valérie, JOSEPH, Eric, AMIOT, Fabien
Format: Article
Language:English
Subjects:
Applied sciences
Cross-disciplinary physics: materials science
rheology
Electronic equipment and fabrication. Passive components, printed wiring boards, connectics
Electronics
Exact sciences and technology
General equipment and techniques
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Materials science
Microelectronic fabrication (materials and surfaces technology)
Physics
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Sensors (chemical, optical, electrical, movement, gas, etc.)
remote sensing
Surface treatments
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ISSN:0167-9317
1873-5568