Design and simulation of mass sensors based on horizontally actuated silicon cantilevers: Micro/Nano Devices and Systems 2013: An open thematic journal issue

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Bibliographic Details
Published in:Microelectronic engineering 2014, Vol.119, p.83-88
Main Authors: SANCHEZ-FRAGA, Rodolfo, PONCE-PONCE, Victor H, MENDOZA-ACEVEDO, Salvador, VILLA-VARGAS, Luis A, ESTRADA-VAZQUEZ, Horacio
Format: Article
Language:English
Subjects:
Applied sciences
Computer science
control theory
systems
Control theory. Systems
Design. Technologies. Operation analysis. Testing
Dielectric, amorphous and glass solid devices
Electronics
Exact sciences and technology
General equipment and techniques
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Integrated circuits
Physics
Robotics
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Transducers
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ISSN:0167-9317
1873-5568