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Deposition and electrical characterization of very thin SrTiO3 films for ultra large scale integrated dynamic random access memory application

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Bibliographic Details
Published in:	Japanese journal of applied physics 1995, Vol.34 (9B), p.5178-5183
Main Authors:	CHEOL SEONG HWANG, SOON OH PARK, CHANG SEOK KANG, HAG-JU CHO, HO-KYU KANG, SUNG TAE AHN, MOON YOUN LEE
Format:	Article
Language:	English
Subjects:	Applied sciences Electronics Exact sciences and technology Integrated circuits Integrated circuits by function (including memories and processors) Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Online Access:	Get full text
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