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Time-resolved observation of laser-induced surface reaction for Si/Cl2 system using second-harmonic generation

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Bibliographic Details
Published in:	Japanese journal of applied physics 1996, Vol.35 (4B), p.2416-2420
Main Authors:	HARAICHI, S, SASAKI, F, KOBAYASHI, S, KOMURO, M, TANI, T
Format:	Article
Language:	English
Subjects:	Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Exact sciences and technology Materials science Physical radiation effects, radiation damage Physics Solid-fluid interfaces Structure of solids and liquids crystallography Surface cleaning, etching, patterning Surface treatments Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) Ultraviolet, visible, and infrared radiation effects (including laser radiation)
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