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Time-resolved observation of laser-induced surface reaction for Si/Cl2 system using second-harmonic generation

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Published in:	Japanese journal of applied physics 1996, Vol.35 (4B), p.2416-2420
Main Authors:	HARAICHI, S, SASAKI, F, KOBAYASHI, S, KOMURO, M, TANI, T
Format:	Article
Language:	English
Subjects:	Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Exact sciences and technology Materials science Physical radiation effects, radiation damage Physics Solid-fluid interfaces Structure of solids and liquids crystallography Surface cleaning, etching, patterning Surface treatments Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) Ultraviolet, visible, and infrared radiation effects (including laser radiation)
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container_issue	4B
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container_title	Japanese journal of applied physics
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creator	HARAICHI, S SASAKI, F KOBAYASHI, S KOMURO, M TANI, T
description
doi_str_mv	10.1143/jjap.35.2416
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ispartof	Japanese journal of applied physics, 1996, Vol.35 (4B), p.2416-2420
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source	Institute of Physics IOPscience extra; Institute of Physics:Jisc Collections:IOP Publishing Read and Publish 2024-2025 (Reading List)
subjects	Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Exact sciences and technology Materials science Physical radiation effects, radiation damage Physics Solid-fluid interfaces Structure of solids and liquids crystallography Surface cleaning, etching, patterning Surface treatments Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) Ultraviolet, visible, and infrared radiation effects (including laser radiation)
title	Time-resolved observation of laser-induced surface reaction for Si/Cl2 system using second-harmonic generation
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