Characteristic temperatures and electron number densities in an r.f. capacitively coupled plasma

The excitation temperatures of Ar and Fe, the ionization temperatures of Ar and Ca and the electron number densities have been determined for a radiofrequency capacitively coupled plasma in the tip-ring electrode geometry. The temperatures and the electron number densities possess their maximum valu...

Full description

Saved in:
Bibliographic Details
Published in:Analytical and bioanalytical chemistry 1996-06, Vol.355 (3-4), p.250-251
Main Authors: ANGHEL, S. D, FRENTIU, T, DARVASI, E, RUSU, A.-M, SIMON, A, CORDOS, E. A
Format: Article
Language:English
Subjects:
Discharges for spectral sources (including inductively coupled plasma)
Discharges for spectral sources (including inductively coupled plasmas)
Electric discharges
Exact sciences and technology
Physics
Physics of gases, plasmas and electric discharges
Physics of plasmas and electric discharges
Citations: Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:The excitation temperatures of Ar and Fe, the ionization temperatures of Ar and Ca and the electron number densities have been determined for a radiofrequency capacitively coupled plasma in the tip-ring electrode geometry. The temperatures and the electron number densities possess their maximum value close to the electrodes.
ISSN:0937-0633
1618-2642
1432-1130
1618-2650
DOI:10.1007/s0021663550250