Analysis and application of a 0/1 order Talbot interferometer for 193 nm laser grating formation

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Bibliographic Details
Published in:Optics communications 1996-08, Vol.129 (1-2), p.98-108
Main Authors: DYER, P. E, FARLEY, R. J, GIEDL, R
Format: Article
Language:English
Subjects:
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Interferometers
Optical instruments, equipment and techniques
Physics
Online Access:Get full text
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ISSN:0030-4018
1873-0310
DOI:10.1016/0030-4018(96)00107-1