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Water diffusivity of dielectric films evaluated with use of D2O

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Bibliographic Details
Published in:	Japanese journal of applied physics 1994, Vol.33 (10B), p.L1445-L1448
Main Authors:	FUKUDA, K, NAKANO, T, FUJISHIMA, M, MURA, N, TOKUNAGA, K, ICHINOSE, S
Format:	Article
Language:	English
Subjects:	Condensed matter: structure, mechanical and thermal properties Diffusion in solids Exact sciences and technology Other nonelectronic physical properties Physical properties of thin films, nonelectronic Physics Self-diffusion and ionic conduction in nonmetals Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) Transport properties of condensed matter (nonelectronic)
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