Advances in high-Q piezoelectric resonator materials and devices

In order to compare piezoelectric materials and devices, an intrinsic parameter, the motional time constant /spl tau//sub 1//sup (m/)=(/spl omega//sub m/Q/sub m/)/sup -1/ for a particular mode m is employed. The use of /spl tau//sub 1//sup (m/) follows from the accommodation of acoustic loss in the...

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Bibliographic Details
Published in:IEEE transactions on ultrasonics, ferroelectrics, and frequency control ferroelectrics, and frequency control, 1994-11, Vol.41 (6), p.834-844
Main Authors: Ballato, A., Gualtieri, J.G.
Format: Article
Language:English
Subjects:
Acoustic devices
Acoustic materials
Acoustic wave devices, piezoelectric and piezoresistive devices
Applied sciences
Attenuation
Crystalline materials
Damping
Electronics
Equivalent circuits
Exact sciences and technology
Impurities
Piezoelectric devices
Piezoelectric materials
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Viscosity
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Summary:In order to compare piezoelectric materials and devices, an intrinsic parameter, the motional time constant /spl tau//sub 1//sup (m/)=(/spl omega//sub m/Q/sub m/)/sup -1/ for a particular mode m is employed. The use of /spl tau//sub 1//sup (m/) follows from the accommodation of acoustic loss in the elastic compliance/stiffness and the establishment of material coefficients that are elements of viscosity matrices. Alternative and fully equivalent definitions of /spl tau//sub 1/ are given based on the RC time constant derived from the equivalent circuit representation of a crystal resonator, acoustic attenuation, logarithmic decrement, and viscosity or damping. For quartz devices, the variation of /spl tau//sub 1/: for any simple thickness mode, for the Y'X shear mode for rotated Y-cuts, and with diameter-thickness ratio for AT-cuts is discussed. Other factors such as mounting loss and loss caused by crystal inhomogeneities (dislocations, defect positions in the resonator, and impurity migration under vibrational stress) are briefly considered with quartz devices as the model. Some new piezoelectric materials/material constants/devices are reviewed and their motional time constants are compared. A physical parameter, composed of acoustic velocity, piezoelectric coupling, and /spl tau//sub 1/ is identified which aids in understanding the maximum frequency limitations of plate resonators.< >
ISSN:0885-3010
1525-8955
DOI:10.1109/58.330264