Ionic contamination in metal-oxide-semiconductor Al/SiO2/3C-SiC capacitors

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Bibliographic Details
Published in:Journal of the Electrochemical Society 1995, Vol.142 (1), p.282-285
Main Authors: RAYNAUD, C, AUTRAN, J.-L, BRIOT, J.-B, BALLAND, B, BECOURT, N, JAUSSAUD, C
Format: Article
Language:English
Subjects:
Applied sciences
Compound structure devices
Electronics
Exact sciences and technology
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Online Access:Get full text
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ISSN:0013-4651
1945-7111
DOI:10.1149/1.2043905