Micro- and Nano- Engineering 98, MNE. Proceedings of the International Conference on Micro- and Nanofabrication, September 22-24 1998, Leuven, Belgium

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Bibliographic Details
Main Authors: VAN DEN HOVE, Luc, VAN ROSSUM, Marc, RONSE, Kurt
Format: Conference Proceeding
Language:English
Subjects:
Applied sciences
Electronics
Exact sciences and technology
Integrated circuits
Integrated circuits by function (including memories and processors)
Microelectronic fabrication (materials and surfaces technology)
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
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ISSN:0167-9317
1873-5568