Fabrication of silicon membrane using fusion fonding and two-step electrochemical etch-stopping

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Bibliographic Details
Published in:Journal of materials science 1994, Vol.29 (3), p.664-668
Main Authors: JU, B. K, OH, M. H, TCHAH, K. H
Format: Article
Language:English
Subjects:
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Mechanical instruments, equipment and techniques
Physics
Online Access:Get full text
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ISSN:0022-2461
1573-4803