The influence of the microstructure on the thermal stability of a-Si1-xNx:H films

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Bibliographic Details
Published in:Physica. B, Condensed matter Condensed matter, 1994, Vol.193 (2), p.195-200
Main Authors: AIVAZOV, A. A, BUDAGUAN, B. G, SAZONOV, A. YU
Format: Article
Language:Russian
Online Access:Get full text
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ISSN:0921-4526
1873-2135