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The influence of the microstructure on the thermal stability of a-Si1-xNx:H films
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| Published in: | Physica. B, Condensed matter Condensed matter, 1994, Vol.193 (2), p.195-200 |
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| Main Authors: | , , |
| Format: | Article |
| Language: | Russian |
| Online Access: | Get full text |
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| container_end_page | 200 |
| container_issue | 2 |
| container_start_page | 195 |
| container_title | Physica. B, Condensed matter |
| container_volume | 193 |
| creator | AIVAZOV, A. A BUDAGUAN, B. G SAZONOV, A. YU |
| description | |
| format | article |
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| fulltext | fulltext |
| identifier | ISSN: 0921-4526 |
| ispartof | Physica. B, Condensed matter, 1994, Vol.193 (2), p.195-200 |
| issn | 0921-4526 1873-2135 |
| language | rus |
| recordid | cdi_pascalfrancis_primary_3965891 |
| source | ScienceDirect: Physics General Backfile |
| title | The influence of the microstructure on the thermal stability of a-Si1-xNx:H films |
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