Low-temperature chemical vapor deposition of Sb films using (i-Pr)2SbH

Saved in:
Bibliographic Details
Published in:Chemistry of materials 1993-07, Vol.5 (7), p.979-982
Main Authors: GEDRIDGE, R. W, LEE, K. E, LOWE-MA, C
Format: Article
Language:English
Subjects:
Applied sciences
Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.)
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Materials science
Metals. Metallurgy
Methods of deposition of films and coatings
film growth and epitaxy
Physics
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:
ISSN:0897-4756
1520-5002
DOI:10.1021/cm00031a017