A 150-V multiple up-brain VDMOS, CMOS, and bipolar process in direct-bonded silicon on insulator on silicon

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Bibliographic Details
Published in:IEEE electron device letters 1992, Vol.13 (9), p.460-461
Main Authors: IFSTRÖM, T, APEL, U, GRAF, H.-G, HARENDT, C, HÖFFLINGER, B
Format: Article
Language:English
Subjects:
Applied sciences
Design. Technologies. Operation analysis. Testing
Electronics
Exact sciences and technology
Integrated circuits
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Online Access:Get full text
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ISSN:0741-3106
1558-0563