Optimization of undoped GaAs by low-pressure OMPVE using trimethylgallium

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Bibliographic Details
Published in:Journal of electronic materials 1992, Vol.21 (10), p.947-953
Main Authors: LANDINI, B. E, AGAHI, F, KEI MAY LIU
Format: Article
Language:English
Subjects:
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Ion and electron beam-assisted deposition
ion plating
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
Physics
Online Access:Get full text
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ISSN:0361-5235
1543-186X