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New ultra high-speed VUG-SIBH laser structure with 2 ps-RC product

A new all-MOVPE low-RC BH laser structure with semi-insulating (SI) InP layers was designed. This structure was designed to avoid a selective epitaxy step. The fabrication process consists of three MOVPE steps. An extremely low capacitance below 0.6 pF and a series resistance around 3 Omega ; (RC pr...

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Bibliographic Details
Published in:Journal of lightwave technology 1992-12, Vol.10 (12), p.1935-1938
Main Authors: Kazmierski, C., Robein, D., Mathoorasing, D.
Format: Article
Language:English
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Summary:A new all-MOVPE low-RC BH laser structure with semi-insulating (SI) InP layers was designed. This structure was designed to avoid a selective epitaxy step. The fabrication process consists of three MOVPE steps. An extremely low capacitance below 0.6 pF and a series resistance around 3 Omega ; (RC product
ISSN:0733-8724
1558-2213
DOI:10.1109/50.202815