High‐resolution capacitive pressure gauges

Design, construction, methods of measurement, and uses of high‐resolution capacitive pressure gauges in low temperature applications are reviewed. Pressure gauges for use from 10−3 to over 107 Pa, with a resolution of as high as 1×10−8 are described. Many uses that have been made of these gauges are...

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Bibliographic Details
Published in:Review of scientific instruments 1993-03, Vol.64 (3), p.601-611
Main Author: Adams, E. Dwight
Format: Article
Language:English
Subjects:
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Mechanical instruments, equipment and techniques
Physics
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Summary:Design, construction, methods of measurement, and uses of high‐resolution capacitive pressure gauges in low temperature applications are reviewed. Pressure gauges for use from 10−3 to over 107 Pa, with a resolution of as high as 1×10−8 are described. Many uses that have been made of these gauges are mentioned with emphasis on 3He melting pressure thermometry.
ISSN:0034-6748
1089-7623
DOI:10.1063/1.1144184