Pulsed laser‐induced damage threshold studies of thin aluminum films on quartz: Simultaneous monitoring of optical and acoustic signals

Simultaneous measurements by two techniques for in situ laser‐induced damage threshold (LIDT) detection, based on optical diffraction and acoustic measurements, were demonstrated. Pulsed Nd:YAG laser (532 nm) ablation of 25‐nm‐thick aluminum films on quartz was studied as a test case. The two probes...

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Bibliographic Details
Published in:Review of scientific instruments 1993-06, Vol.64 (6), p.1606-1610
Main Authors: Lai, Yau‐Ming, Cheung, Nai‐Ho
Format: Article
Language:English
Subjects:
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Optical instruments, equipment and techniques
Physics
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Summary:Simultaneous measurements by two techniques for in situ laser‐induced damage threshold (LIDT) detection, based on optical diffraction and acoustic measurements, were demonstrated. Pulsed Nd:YAG laser (532 nm) ablation of 25‐nm‐thick aluminum films on quartz was studied as a test case. The two probes gave consistent LIDT values, and were sensitive and simple to operate. For above‐threshold ablation, the diffraction and acoustic signals were found to be strongly correlated, rendering them useful not just for threshold detection, but for studying ablation dynamics as well.
ISSN:0034-6748
1089-7623
DOI:10.1063/1.1144033