Model for stress and volume changes of a thin film on a susbstrate upon annealing : application to amorphous Mo/Si multilayers

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Bibliographic Details
Published in:Physical review. B, Condensed matter Condensed matter, 1991, Vol.44 (24), p.13519-13533
Main Authors: LOOPSTRA, O. B, VAN SNEK, E. R, DE KEIJSER, T. H, MITTEMEIJER, E. J
Format: Article
Language:English
Subjects:
Condensed matter: structure, mechanical and thermal properties
Exact sciences and technology
Physics
Solid surfaces and solid-solid interfaces
Surface structure and topography
Surfaces and interfaces
thin films and whiskers (structure and nonelectronic properties)
Online Access:Get full text
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ISSN:0163-1829
1095-3795