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AsH3 cracking characteristics in gas source molecular beam epitaxy

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Bibliographic Details
Published in:	Japanese journal of applied physics 1990-12, Vol.29 (12), p.2768-2773
Main Authors:	OHBU, I, TEZEN, Y, ATAKA, S, MOZUME, T
Format:	Article
Language:	English
Subjects:	Condensed matter: structure, mechanical and thermal properties Exact sciences and technology Physics Solid surfaces and solid-solid interfaces Surface and interface dynamics and vibrations Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) Thin film structure and morphology
Online Access:	Get full text
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