Relative fluorine concentrations in radio frequency/electron cyclotron resonance hybrid flow discharges

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Bibliographic Details
Published in:Applied physics letters 1992, Vol.60 (7), p.818-820
Main Authors: PASSOW, M. L, PENDER, J. T. P, BRAKE, M. L, SUNG, K. T, LIU, Y, PANG, S. W, ELTA, M. E
Format: Article
Language:English
Subjects:
Electric discharges
Exact sciences and technology
Physics
Physics of gases, plasmas and electric discharges
Physics of plasmas and electric discharges
Online Access:Get full text
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ISSN:0003-6951
1077-3118