Kinetic study of metalorganic molecular beam epitaxy of GaP, InP, and GaxIn1-xP

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Bibliographic Details
Published in:Journal of applied physics 1991-03, Vol.69 (5), p.3297-3302
Main Authors: GARCIA, J. C, MAUREL, P, BOVE, P, HIRTZ, J. P
Format: Article
Language:English
Subjects:
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
Physics
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ISSN:0021-8979
1089-7550
DOI:10.1063/1.348551