Microfabricated scanning tunneling microscope

A scanning tunneling microscope (STM) with dimensions 1000 mu m*200 mu m*8 mu m constructed by planar microfabrication techniques is discussed. The device incorporates a piezoelectric actuator capable of three-dimensional motion for scanning and control of the tunneling gap spacing. Operation of the...

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Bibliographic Details
Published in:IEEE electron device letters 1989-11, Vol.10 (11), p.490-492
Main Authors: Akamine, S., Albrecht, T.R., Zdeblick, M.J., Quate, C.F.
Format: Article
Language:English
Subjects:
Electrodes
Electron, positron and ion microscopes, electron diffractometers and related techniques
Exact sciences and technology
Instruments
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Microscopy
Motion control
Physics
Piezoelectric actuators
Piezoelectric films
Plasma measurements
Surface topography
Tunneling
Zinc oxide
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Summary:A scanning tunneling microscope (STM) with dimensions 1000 mu m*200 mu m*8 mu m constructed by planar microfabrication techniques is discussed. The device incorporates a piezoelectric actuator capable of three-dimensional motion for scanning and control of the tunneling gap spacing. Operation of the device has been successfully demonstrated by imaging the surface of a graphite sample with atomic resolution.< >
ISSN:0741-3106
1558-0563
DOI:10.1109/55.43113