Microelectronic sensor technology

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Bibliographic Details
Published in:Journal of physics. E, Scientific instruments Scientific instruments, 1986-11, Vol.19 (11), p.891-896
Main Author: Haskard, M R
Format: Article
Language:English
Subjects:
Applications
Applied sciences
Engineering techniques in metallurgy. Applications. Other aspects
Exact sciences and technology
General equipment and techniques
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Metals. Metallurgy
Others aspects
Physics
Sensors (chemical, optical, electrical, movement, gas, etc.)
remote sensing
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ISSN:0022-3735
DOI:10.1088/0022-3735/19/11/001