Process-Based Three-Dimensional Capacitance Simulation -- TRICEPS

A novel three-dimensional (3-D) wiring capacitance simulator for VLSI circuits has been developed and successfully used in various applications, including DRAM-design. The simulator, TRICEPS, determines fully automatically 3-D total and coupling capacitances from mask and processing information. A n...

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Bibliographic Details
Published in:IEEE transactions on computer-aided design of integrated circuits and systems 1986-01, Vol.5 (1), p.215-220
Main Authors: Uebbing, R.H., Fukuma, M.
Format: Article
Language:English
Subjects:
Applied sciences
Circuit simulation
Coupling circuits
Delay
Electronics
Exact sciences and technology
Integrated circuit interconnections
Integrated circuits
National electric code
Nonhomogeneous media
Parasitic capacitance
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Very large scale integration
Wire
Wiring
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Summary:A novel three-dimensional (3-D) wiring capacitance simulator for VLSI circuits has been developed and successfully used in various applications, including DRAM-design. The simulator, TRICEPS, determines fully automatically 3-D total and coupling capacitances from mask and processing information. A novel simple input format, versatility, fast calculation time, and no need for any user interference make it a useful interactive development tool for dense VLSI circuits.
ISSN:0278-0070
1937-4151
DOI:10.1109/TCAD.1986.1270189