Fabrication of Mo-gate/Ti-silicide-cladmoat MOS devices by use of multilayer-glass depositions

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Bibliographic Details
Published in:IEEE electron device letters 1984, Vol.5 (9), p.374-375
Main Author: MCDAVID, J. M
Format: Article
Language:English
Subjects:
Applied sciences
Electronics
Exact sciences and technology
Microelectronic fabrication (materials and surfaces technology)
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Online Access:Get full text
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ISSN:0741-3106
1558-0563