Automatic, digital system for profiling rough surfaces

Four pneumatically actuated reciprocating probes and a translating table are computer controlled to map surfaces with asperity heights of up to 25 mm. The height of a calibration surface can be determined to 0.002 mm. Individual traces may be sampled as often as every 0.025 mm with a neighboring tra...

Full description

Saved in:
Bibliographic Details
Published in:Review of scientific instruments 1985-02, Vol.56 (2), p.330-331
Main Authors: Keller, Kirk, Bonner, Brian P.
Format: Article
Language:English
Subjects:
Exact sciences and technology
Measurements common to several branches of physics and astronomy
Metrology, measurements and laboratory procedures
Physics
Spatial dimensions (e.g.: position, lengths, volume, angles, displacements, including nanometer-scale displacements)
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:Four pneumatically actuated reciprocating probes and a translating table are computer controlled to map surfaces with asperity heights of up to 25 mm. The height of a calibration surface can be determined to 0.002 mm. Individual traces may be sampled as often as every 0.025 mm with a neighboring trace as near as 0.031 mm. Surfaces with dimensions of up to 355×150 mm can be scanned with the system.
ISSN:0034-6748
1089-7623
DOI:10.1063/1.1138299