Some peculiarities of pulsed laser deposition of large area thin films

The fabrication of large area Y-Ba-Cu-O thin films by pulsed laser deposition is discussed. The influence of laser spot dimension, laser fluence and the target topography on the plasma plume angular distribution has been investigated. A film-based method was used for determining angular distribution...

Full description

Saved in:
Bibliographic Details
Published in:IEEE transactions on applied superconductivity 2001-03, Vol.11 (1), p.3859-3862
Main Authors: Kuzanyan, A.S., Badalyan, G.R., Nikoghosyan, V.R., Harutyunyan, S.R.
Format: Article
Language:English
Subjects:
Angular distribution
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Cross-disciplinary physics: materials science
rheology
DEPOSITION
Exact sciences and technology
Geometrical optics
High-tc films
Laser deposition
Laser theory
LASERS
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
Optical films
Optical materials
Optical pulses
PARTICULATES
Physics
Plumes
Pulsed laser deposition
Sputtering
Substrates
Superconducting films and low-dimensional structures
Superconducting materials
SUPERCONDUCTIVITY
Surfaces
THIN FILMS
Topography
YTTRIUM OXIDE
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:The fabrication of large area Y-Ba-Cu-O thin films by pulsed laser deposition is discussed. The influence of laser spot dimension, laser fluence and the target topography on the plasma plume angular distribution has been investigated. A film-based method was used for determining angular distribution. The primary factors affecting the form of the plume have been determined. The spatial distribution of laser-generated particulates has also been investigated. A simple method to obtain large area thin films by deposition through a mask has been examined for reducing the number of particulates.
ISSN:1051-8223
1558-2515
DOI:10.1109/77.919907