Ion-assisted pulsed magnetron sputtering deposition of ta-C films

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Bibliographic Details
Published in:Thin solid films 2001, Vol.389 (1-2), p.16-26
Main Authors: BUGAEV, S. P, PODKOVYROV, V. G, OSKOMOV, K. V, SMAYKINA, S. V, SOCHUGOV, N. S
Format: Article
Language:Russian
Online Access:Get full text
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ISSN:0040-6090
1879-2731