Defects and nanocrystals generated by Si implantation into a-SiO 2

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Bibliographic Details
Published in:IEEE transactions on nuclear science 2000-12, Vol.47 (6), p.2269
Main Authors: Nicklaw, C.J, Pagey, M.P, Pantelides, S.T, Fleetwood, D.M, Schrimpf, R.D, Galloway, K.F, Wittig, J.E, Howard, B.M, Taw, E, McNeil, W.H, Conley, J.F
Format: Article
Language:English
Online Access:Get full text
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ISSN:0018-9499
1558-1578
DOI:10.1109/23.903764