Simultaneous Monitoring Method for Chemical Constituents in Aluminum Etchant

A simultaneous monitoring method to determine the chemical constituents in an aluminum etchant was developed using capillary electrophoresis, as a substitute for the wet titration method that requires long analysis time and tedious work. Anions of acetate, nitrate, and ammonium ions were separated f...

Full description

Saved in:
Bibliographic Details
Published in:IEEE sensors journal 2012-06, Vol.12 (6), p.2180-2185
Main Authors: Jung Woo Jang, Jung June Park, Min Hyuk Kwan, Lim, H. B.
Format: Article
Language:English
Subjects:
Acetates
Aluminum
Aluminum etchant
Analytical chemistry
Calibration
chemical sensor
Chemicals
Chromatography
Constituents
determination of anion
Electrophoresis
Etching
Ions
Liquid crystal displays
Monitoring
Monitoring systems
Nanostructure
recycling etchant
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:A simultaneous monitoring method to determine the chemical constituents in an aluminum etchant was developed using capillary electrophoresis, as a substitute for the wet titration method that requires long analysis time and tedious work. Anions of acetate, nitrate, and ammonium ions were separated from the phosphate matrix within 20 min when a sample of less than a nanoliter was injected. Each identified peak was integrated to determine the target ions quantitatively with an indirect detection mode. From the calibration curve, the detection limits of each ingredient were obtained in the range of 0.98 to 3.57 g/g with a relative standard deviation ( n =4) of less than ±6.05% from the peak area measurement. A lab-built system based on the developed analytical technique was demonstrated to monitor the change of chemical constituents in a buffer etchant typically used in the liquid crystal display manufacturing process. The adaptation of this monitoring system to the production line can lengthen the lifetime of the process chemicals and provide eco-friend recycling for lower chemical consumption.
ISSN:1530-437X
1558-1748
DOI:10.1109/JSEN.2011.2182340