MECHANICAL PROPERTIES OF SILICON CARBON COATING

The aim and objective of this investigation was to investigate the mechanical properties of amorphous hydrogenated silicon carbide (a-SiC:H) layers. The layers were prepared using Plasma enhanced chemical vapor (PECVD) technology on polished tool steel. For formation layers, we used vapors of liquid...

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Bibliographic Details
Published in:Annals of Faculty Engineering Hunedoara 2012-01, Vol.10 (1), p.35
Main Authors: Tischler, Daniel, Budinska, Zuzana, Valova, Marie, Stepanek, Ivo
Format: Article
Language:English
Subjects:
Adhesion
Chemical vapor deposition
Mechanical properties
Silicon carbide
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Summary:The aim and objective of this investigation was to investigate the mechanical properties of amorphous hydrogenated silicon carbide (a-SiC:H) layers. The layers were prepared using Plasma enhanced chemical vapor (PECVD) technology on polished tool steel. For formation layers, we used vapors of liquid precursor Hexamethyldisiloxane (HMDSO) diluted in argon and mixed with various flow of methane (18, 23 and 29 sccm) for comparison. We investigated influence of methane (CH^sub 4^) flow on mechanical properties of a-SiC:H coatings such as adhesion, coefficient of friction, nanohardness, thickness and roughness. The adhesive strength of layers was evaluated by scratch test (through Acoustic Emission) and by static indentation. Nanohardness was studied and compared using nanoindentation tester with Vickers indenter. [PUBLICATION ABSTRACT]
ISSN:1584-2665
2601-2332