Scalable Microwave Plasma Sources From Low to Atmospheric Pressure

There are very specific demands on the plasma processes used in various plasma technological applications. Microwave plasmas offer a wide range of applications for different pressures ranging from very low pressure (

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Bibliographic Details
Published in:Contributions to plasma physics (1988) 2012-08, Vol.52 (7), p.607-614
Main Authors: Schulz, A., Büchele, P., Ramisch, E., Janzen, O., Jimenez, F., Kamm, C., Kopecki, J., Leins, M., Merli, S., Petto, H., Mendez, F.R., Schneider, J., Schumacher, U., Walker, M., Stroth, U.
Format: Article
Language:English
Subjects:
Duo-Plasmaline
ECR plasma
Microwave plasma
plasma torch
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Summary:There are very specific demands on the plasma processes used in various plasma technological applications. Microwave plasmas offer a wide range of applications for different pressures ranging from very low pressure (
ISSN:0863-1042
1521-3986
DOI:10.1002/ctpp.201210057