Multi-Species Focused Ion Beam Processing for III-V Semiconductor Materials

Extended abstract of a paper presented at Microscopy and Microanalysis 2012 in Phoenix, Arizona, USA, July 29 – August 2, 2012.

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Bibliographic Details
Published in:Microscopy and microanalysis 2012-07, Vol.18 (S2), p.616-617
Main Authors: Gila, B.P., Appleton, B.R., Fridmann, J., Sanabia, J.E., Mazarov, P.
Format: Article
Language:English
Subjects:
Electrons
Focused Ion Beam Instrumentation & Applications for Physical and Biological Sciences-02
Instrumentation Symposium
Ion beams
Nanoscience
Online Access:Get full text
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Description
Summary:Extended abstract of a paper presented at Microscopy and Microanalysis 2012 in Phoenix, Arizona, USA, July 29 – August 2, 2012.
ISSN:1431-9276
1435-8115
DOI:10.1017/S143192761200493X