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Effects of Mn-doping on surface acoustic wave properties of ZnO films
Surface acoustic wave (SAW) filters based on Mn‐doped ZnO films have been fabricated and effects of Mn‐doping on SAW properties are investigated. It is found that the electromechanical coupling coefficient (K2) of Zn0.913Mn0.087O films is 0.73 ± 0.02%, which is 73.8% larger than that of undoped ZnO...
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Published in: | Physica status solidi. PSS-RRL. Rapid research letters 2012-11, Vol.6 (11), p.436-438 |
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description | Surface acoustic wave (SAW) filters based on Mn‐doped ZnO films have been fabricated and effects of Mn‐doping on SAW properties are investigated. It is found that the electromechanical coupling coefficient (K2) of Zn0.913Mn0.087O films is 0.73 ± 0.02%, which is 73.8% larger than that of undoped ZnO films (0.42 ± 0.02%). Zn0.913Mn0.087O film filters also exhibit a lower absolute value of insertion loss (|IL|) of 16.1 dB and larger bandwidth (BW) of 5.9 MHz compared with that of undoped ZnO film filter. However, Zn0.952Mn0.048O film filters exhibit a smaller K2 of 0.34 ± 0.02%, larger |IL| of 26.9 dB and smaller BW of 3.5 MHz. It is suggested that the SAW properties can be improved by appropriate Mn‐doping and Mn–ZnO/Si multilayer structure with large d33 is promising for wide‐band and low‐loss SAW applications. (© 2012 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
The piezoelectric coefficient d33 of ZnO:Mn films is a key factor determining the performance of ZnO:Mn/Si surface acoustic wave (SAW) devices, and the SAW properties can be improved by doping with an appropriate Mn concentration. The absolute value of the insertion loss is inversely proportional to d33, while the electromechanical coupling coefficient and bandwidth are both proportional to d33. A Mn–ZnO/Si multilayer structure with large d33 is promising for high frequency, wide‐band and low‐loss SAW applications. |
doi_str_mv | 10.1002/pssr.201206381 |
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The piezoelectric coefficient d33 of ZnO:Mn films is a key factor determining the performance of ZnO:Mn/Si surface acoustic wave (SAW) devices, and the SAW properties can be improved by doping with an appropriate Mn concentration. The absolute value of the insertion loss is inversely proportional to d33, while the electromechanical coupling coefficient and bandwidth are both proportional to d33. A Mn–ZnO/Si multilayer structure with large d33 is promising for high frequency, wide‐band and low‐loss SAW applications.</description><identifier>ISSN: 1862-6254</identifier><identifier>EISSN: 1862-6270</identifier><identifier>DOI: 10.1002/pssr.201206381</identifier><language>eng</language><publisher>Berlin: WILEY-VCH Verlag</publisher><subject>doping ; Electromagnetics ; electromechanical properties ; piezoelectric properties ; surface acoustic waves ; Surface chemistry ; Thin films ; ZnO</subject><ispartof>Physica status solidi. PSS-RRL. Rapid research letters, 2012-11, Vol.6 (11), p.436-438</ispartof><rights>Copyright © 2012 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim</rights><rights>Copyright 2012 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c3551-e56110947c1fdedc6161f441f6c9b7cecc475925b45b5264d41e9b144a11b373</citedby><cites>FETCH-LOGICAL-c3551-e56110947c1fdedc6161f441f6c9b7cecc475925b45b5264d41e9b144a11b373</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,780,784,27924,27925</link.rule.ids></links><search><creatorcontrib>Luo, J. T.</creatorcontrib><creatorcontrib>Fan, P.</creatorcontrib><creatorcontrib>Pan, F.</creatorcontrib><creatorcontrib>Zeng, F.</creatorcontrib><creatorcontrib>Zhang, D. P.</creatorcontrib><creatorcontrib>Zheng, Z. H.</creatorcontrib><creatorcontrib>Liang, G. X.</creatorcontrib><creatorcontrib>Cai, X. M.</creatorcontrib><title>Effects of Mn-doping on surface acoustic wave properties of ZnO films</title><title>Physica status solidi. PSS-RRL. Rapid research letters</title><addtitle>Phys. Status Solidi RRL</addtitle><description>Surface acoustic wave (SAW) filters based on Mn‐doped ZnO films have been fabricated and effects of Mn‐doping on SAW properties are investigated. It is found that the electromechanical coupling coefficient (K2) of Zn0.913Mn0.087O films is 0.73 ± 0.02%, which is 73.8% larger than that of undoped ZnO films (0.42 ± 0.02%). Zn0.913Mn0.087O film filters also exhibit a lower absolute value of insertion loss (|IL|) of 16.1 dB and larger bandwidth (BW) of 5.9 MHz compared with that of undoped ZnO film filter. However, Zn0.952Mn0.048O film filters exhibit a smaller K2 of 0.34 ± 0.02%, larger |IL| of 26.9 dB and smaller BW of 3.5 MHz. It is suggested that the SAW properties can be improved by appropriate Mn‐doping and Mn–ZnO/Si multilayer structure with large d33 is promising for wide‐band and low‐loss SAW applications. (© 2012 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
The piezoelectric coefficient d33 of ZnO:Mn films is a key factor determining the performance of ZnO:Mn/Si surface acoustic wave (SAW) devices, and the SAW properties can be improved by doping with an appropriate Mn concentration. The absolute value of the insertion loss is inversely proportional to d33, while the electromechanical coupling coefficient and bandwidth are both proportional to d33. A Mn–ZnO/Si multilayer structure with large d33 is promising for high frequency, wide‐band and low‐loss SAW applications.</description><subject>doping</subject><subject>Electromagnetics</subject><subject>electromechanical properties</subject><subject>piezoelectric properties</subject><subject>surface acoustic waves</subject><subject>Surface chemistry</subject><subject>Thin films</subject><subject>ZnO</subject><issn>1862-6254</issn><issn>1862-6270</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2012</creationdate><recordtype>article</recordtype><recordid>eNqFkE1Lw0AQhhdRsFavnhc8p-5kv7pHKbUK_cIWhF6WZLMrqW0Sd1Nr_72pkeLN08zhfd4ZHoRugfSAkPi-CsH3YgIxEbQPZ6gDfRFHIpbk_LRzdomuQlgTwpVktIOGQ-esqQMuHZ4UUVZWefGGywKHnXeJsTgx5S7UucH75NPiypeV9XVuf4BVMcMu32zDNbpwySbYm9_ZRcvH4XLwFI1no-fBwzgylHOILBcARDFpwGU2MwIEOMbACaNSaawxTHIV85TxlMeCZQysSoGxBCClknbRXVvbvPGxs6HW63Lni-aiBsoEKNrnokn12pTxZaPEOl35fJv4gwaij6b00ZQ-mWoA1QL7fGMP_6T1fLF4-ctGLZuH2n6d2MS_ayGp5Pp1OtJqMpjPF1OuV_Qblat7gw</recordid><startdate>201211</startdate><enddate>201211</enddate><creator>Luo, J. T.</creator><creator>Fan, P.</creator><creator>Pan, F.</creator><creator>Zeng, F.</creator><creator>Zhang, D. P.</creator><creator>Zheng, Z. H.</creator><creator>Liang, G. X.</creator><creator>Cai, X. M.</creator><general>WILEY-VCH Verlag</general><general>WILEY‐VCH Verlag</general><general>Wiley Subscription Services, Inc</general><scope>BSCLL</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7U5</scope><scope>8FD</scope><scope>L7M</scope></search><sort><creationdate>201211</creationdate><title>Effects of Mn-doping on surface acoustic wave properties of ZnO films</title><author>Luo, J. T. ; Fan, P. ; Pan, F. ; Zeng, F. ; Zhang, D. P. ; Zheng, Z. H. ; Liang, G. X. ; Cai, X. M.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c3551-e56110947c1fdedc6161f441f6c9b7cecc475925b45b5264d41e9b144a11b373</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2012</creationdate><topic>doping</topic><topic>Electromagnetics</topic><topic>electromechanical properties</topic><topic>piezoelectric properties</topic><topic>surface acoustic waves</topic><topic>Surface chemistry</topic><topic>Thin films</topic><topic>ZnO</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Luo, J. T.</creatorcontrib><creatorcontrib>Fan, P.</creatorcontrib><creatorcontrib>Pan, F.</creatorcontrib><creatorcontrib>Zeng, F.</creatorcontrib><creatorcontrib>Zhang, D. P.</creatorcontrib><creatorcontrib>Zheng, Z. H.</creatorcontrib><creatorcontrib>Liang, G. X.</creatorcontrib><creatorcontrib>Cai, X. M.</creatorcontrib><collection>Istex</collection><collection>CrossRef</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Physica status solidi. PSS-RRL. Rapid research letters</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Luo, J. T.</au><au>Fan, P.</au><au>Pan, F.</au><au>Zeng, F.</au><au>Zhang, D. P.</au><au>Zheng, Z. H.</au><au>Liang, G. X.</au><au>Cai, X. M.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Effects of Mn-doping on surface acoustic wave properties of ZnO films</atitle><jtitle>Physica status solidi. PSS-RRL. Rapid research letters</jtitle><addtitle>Phys. Status Solidi RRL</addtitle><date>2012-11</date><risdate>2012</risdate><volume>6</volume><issue>11</issue><spage>436</spage><epage>438</epage><pages>436-438</pages><issn>1862-6254</issn><eissn>1862-6270</eissn><abstract>Surface acoustic wave (SAW) filters based on Mn‐doped ZnO films have been fabricated and effects of Mn‐doping on SAW properties are investigated. It is found that the electromechanical coupling coefficient (K2) of Zn0.913Mn0.087O films is 0.73 ± 0.02%, which is 73.8% larger than that of undoped ZnO films (0.42 ± 0.02%). Zn0.913Mn0.087O film filters also exhibit a lower absolute value of insertion loss (|IL|) of 16.1 dB and larger bandwidth (BW) of 5.9 MHz compared with that of undoped ZnO film filter. However, Zn0.952Mn0.048O film filters exhibit a smaller K2 of 0.34 ± 0.02%, larger |IL| of 26.9 dB and smaller BW of 3.5 MHz. It is suggested that the SAW properties can be improved by appropriate Mn‐doping and Mn–ZnO/Si multilayer structure with large d33 is promising for wide‐band and low‐loss SAW applications. (© 2012 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
The piezoelectric coefficient d33 of ZnO:Mn films is a key factor determining the performance of ZnO:Mn/Si surface acoustic wave (SAW) devices, and the SAW properties can be improved by doping with an appropriate Mn concentration. The absolute value of the insertion loss is inversely proportional to d33, while the electromechanical coupling coefficient and bandwidth are both proportional to d33. A Mn–ZnO/Si multilayer structure with large d33 is promising for high frequency, wide‐band and low‐loss SAW applications.</abstract><cop>Berlin</cop><pub>WILEY-VCH Verlag</pub><doi>10.1002/pssr.201206381</doi><tpages>3</tpages></addata></record> |
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subjects | doping Electromagnetics electromechanical properties piezoelectric properties surface acoustic waves Surface chemistry Thin films ZnO |
title | Effects of Mn-doping on surface acoustic wave properties of ZnO films |
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