TiOy^sub 2^-Based Ultraviolet Photodetectors

This study demonstrates that anatase TiO... thin films were grown on Corning glass substrates by radio frequency magnetron sputtering and were then used to fabricate metal-semiconductor-metal (MSM) ultraviolet (UV) photodetectors (PDs) with different contact electrodes (Ag or Au). With a 320-nm illu...

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Bibliographic Details
Published in:Integrated ferroelectrics 2013-01, Vol.143 (1), p.65
Main Authors: Ji, L W, Water, W, Hsiao, Y J, Tsai, J K, Lam, K T, Meen, T H, Chen, Y F, Shih, W S
Format: Article
Language:English
Subjects:
Electrodes
Glass substrates
Radio frequency
Thin films
Ultraviolet radiation
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Summary:This study demonstrates that anatase TiO... thin films were grown on Corning glass substrates by radio frequency magnetron sputtering and were then used to fabricate metal-semiconductor-metal (MSM) ultraviolet (UV) photodetectors (PDs) with different contact electrodes (Ag or Au). With a 320-nm illumination and 5 V applied bias, the responsivities for the Ag/TiO.../Ag and Au/TiO.../Au MSM PDs were 4.31 and 16.6 A/W, respectively. Additionally, the photoconductive gain and Schottky barrier height at the Ag/TiO... and Au/TiO... interfaces were also discussed in the investigation. (ProQuest: ... denotes formulae/symbols omitted.)
ISSN:1058-4587
1607-8489