PLASMA COPOLYMERIZATION OF CFC-113 WITH C2H2, C2H4 AND C2H6 MONOMERS

CFC-113 is known to be difficult to polymerize as a single monomer when treated under conventional plasma polymerization conditions. However, we found that by mixing it with substances with similar chemical structures, such as acethylene (C2H2), ethylene (C2H4) or ethane (C2H6), there are polymerize...

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Bibliographic Details
Published in:Journal of Photopolymer Science and Technology 1995, Vol.8(3), pp.393-398
Main Authors: TSUJI, OSAMU, SAWAI, MIKIO, NAKANO, HIROHIKO, MINAGUCHI, TAKESHI
Format: Article
Language:English
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Summary:CFC-113 is known to be difficult to polymerize as a single monomer when treated under conventional plasma polymerization conditions. However, we found that by mixing it with substances with similar chemical structures, such as acethylene (C2H2), ethylene (C2H4) or ethane (C2H6), there are polymerized at a higher deposition rate. We observed one significant aspect of this reaction is that the copolymerization of C2H2 can reach deposition rates up to 9000 Å/min, we also observed the higher deposition rates of CFC-113 and hydrocarbons polymerized as a function of number of hydrogen molecules such as C2H2>C2H4>C2H6. A reaction pathway is proposed in which fluorine atoms derived from CFC-113 react rapidly with hydrocarbon producing free radical intermediates which can subsquently polymerize.
ISSN:0914-9244
1349-6336
DOI:10.2494/photopolymer.8.393