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Divinyloxyalkane Cross-linker on DUV Photoresist

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Bibliographic Details
Published in:	Journal of Photopolymer Science and Technology 1998, Vol.11(3), pp.537-540
Main Authors:	Watanabe, Hirohmi, Maeshima, Kei'ichi, Aoai, Toshiaki, Kondo, Syun'ichi, Naitoh, Takuya, Ohfuji, Takeshi, Sasago, Masaru, Miyagawa, Nobukazu, Takahara, Shigeru, Yamaoka, Tsuguo
Format:	Article
Language:	English
Subjects:	Acetalization Acid-catalyzed de-cross-linking Divinyloxyalkane Thermal cross-linking Three-component photoresist
Citations:	Items that cite this one
Online Access:	Get full text
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