Divinyloxyalkane Cross-linker on DUV Photoresist

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Published in:Journal of Photopolymer Science and Technology 1998, Vol.11(3), pp.537-540
Main Authors: Watanabe, Hirohmi, Maeshima, Kei'ichi, Aoai, Toshiaki, Kondo, Syun'ichi, Naitoh, Takuya, Ohfuji, Takeshi, Sasago, Masaru, Miyagawa, Nobukazu, Takahara, Shigeru, Yamaoka, Tsuguo
Format: Article
Language:English
Subjects:
Acetalization
Acid-catalyzed de-cross-linking
Divinyloxyalkane
Thermal cross-linking
Three-component photoresist
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container_title Journal of Photopolymer Science and Technology
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creator Watanabe, Hirohmi
Maeshima, Kei'ichi
Aoai, Toshiaki
Kondo, Syun'ichi
Naitoh, Takuya
Ohfuji, Takeshi
Sasago, Masaru
Miyagawa, Nobukazu
Takahara, Shigeru
Yamaoka, Tsuguo
description
doi_str_mv 10.2494/photopolymer.11.537
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source Free Full-Text Journals in Chemistry
subjects Acetalization
Acid-catalyzed de-cross-linking
Divinyloxyalkane
Thermal cross-linking
Three-component photoresist
title Divinyloxyalkane Cross-linker on DUV Photoresist
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