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Development of Novel Photoresist Polymer

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Bibliographic Details
Published in:Journal of Photopolymer Science and Technology 1999, Vol.12(1), pp.173-176
Main Authors: Miyake, Hiroto, Tanigawa, Hiroto, Okumura, Koichi, Nagashima, Yasuhiro, Maruo, Katsuya, Kobayashi, Kenji, Fukui, Yoshitaka
Format: Article
Language:English
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ISSN:0914-9244
1349-6336
DOI:10.2494/photopolymer.12.173