Mechanism of Acid-Catalyzed Crosslinking Reaction with Hydroxyethyl Group and Application to Microlithography

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Bibliographic Details
Published in:Journal of Photopolymer Science and Technology 1999, Vol.12(2), pp.303-306
Main Authors: Aoai, Toshiaki, Lee, Jong Soo, Watanabe, Hirohmi, Kondo, Syun'ichi, Miyagawa, Nobukazu, Takahara, Shigeru, Yamaoka, Tsuguo
Format: Article
Language:English
Subjects:
2-hydroxyethyl methacrylate
negative working crosslinking
photoacid generator
transesterification
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ISSN:0914-9244
1349-6336
DOI:10.2494/photopolymer.12.303