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Synthesis of Cyclized Copolymer from N-Substituted Dimethacrylamide and Application to a Photoresist with a Photo-Acid Generator

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Bibliographic Details
Published in:	Journal of Photopolymer Science and Technology 2000, Vol.13(2), pp.207-210
Main Authors:	Takao, Yasuyuki, Miyagawa, Nobukazu, Takahara, Shigeru, Yamaoka, Tsuguo
Format:	Article
Language:	English
Subjects:	cyclized copolymerization cyclocopolymer N-substituted dimethacrylamide photoresist
Citations:	Items that cite this one
Online Access:	Get full text
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