Electron-Beam Induced Reactions of Sulfonium Salts in a Crystalline State

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Bibliographic Details
Published in:Journal of Photopolymer Science and Technology 2004, Vol.17(1), pp.41-44
Main Authors: Enomoto, Kazuyuki, Maekawa, Yasunari, Moon, Seong-Yun, Shimoyama, Junji, Goto, Kazuyuki, Narita, Tadashi, Yoshida, Masaru
Format: Article
Language:English
Subjects:
counter anion
crystalline state
electron-beam resists
sulfonium salt
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ISSN:0914-9244
1349-6336
DOI:10.2494/photopolymer.17.41