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Electron-Beam Induced Reactions of Sulfonium Salts in a Crystalline State
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Published in: | Journal of Photopolymer Science and Technology 2004, Vol.17(1), pp.41-44 |
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container_end_page | 44 |
container_issue | 1 |
container_start_page | 41 |
container_title | Journal of Photopolymer Science and Technology |
container_volume | 17 |
creator | Enomoto, Kazuyuki Maekawa, Yasunari Moon, Seong-Yun Shimoyama, Junji Goto, Kazuyuki Narita, Tadashi Yoshida, Masaru |
description | |
doi_str_mv | 10.2494/photopolymer.17.41 |
format | article |
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ispartof | Journal of Photopolymer Science and Technology, 2004, Vol.17(1), pp.41-44 |
issn | 0914-9244 1349-6336 |
language | eng |
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source | Full-Text Journals in Chemistry (Open access) |
subjects | counter anion crystalline state electron-beam resists sulfonium salt |
title | Electron-Beam Induced Reactions of Sulfonium Salts in a Crystalline State |
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