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Electron-Beam Induced Reactions of Sulfonium Salts in a Crystalline State

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Published in:Journal of Photopolymer Science and Technology 2004, Vol.17(1), pp.41-44
Main Authors: Enomoto, Kazuyuki, Maekawa, Yasunari, Moon, Seong-Yun, Shimoyama, Junji, Goto, Kazuyuki, Narita, Tadashi, Yoshida, Masaru
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ispartof Journal of Photopolymer Science and Technology, 2004, Vol.17(1), pp.41-44
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subjects counter anion
crystalline state
electron-beam resists
sulfonium salt
title Electron-Beam Induced Reactions of Sulfonium Salts in a Crystalline State
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