Investigation of Application Availability of UV-NIL by Using Several Types of Photo-curable Resin

We prepared five kinds of photo-curable resins, and conducted evaluation experiments for their thermal properties, mechanical properties, and application availability for the imprint process. Measurements of thermal properties using the TG method, TM-DSC method, and laser interferometric method were...

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Published in:Journal of Photopolymer Science and Technology 2005, Vol.18(4), pp.531-536
Main Authors: Sakai, Nobuji, Taniguchi, Jun, Kawaguchi, Kenshi, Ohtaguchi, Makoto, Hirasawa, Tamano
Format: Article
Language:English
Subjects:
Adhesive Force
Glass-transition temperature
Mold
Photo-curable resin
UV-nanoimprint
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cited_by cdi_FETCH-LOGICAL-c535t-109c2d5ee7e2187dc20e39a99bc9a7d7a22ebd1964547bd51b2e9f4e3826363c3
cites cdi_FETCH-LOGICAL-c535t-109c2d5ee7e2187dc20e39a99bc9a7d7a22ebd1964547bd51b2e9f4e3826363c3
container_end_page 536
container_issue 4
container_start_page 531
container_title Journal of Photopolymer Science and Technology
container_volume 18
creator Sakai, Nobuji
Taniguchi, Jun
Kawaguchi, Kenshi
Ohtaguchi, Makoto
Hirasawa, Tamano
description We prepared five kinds of photo-curable resins, and conducted evaluation experiments for their thermal properties, mechanical properties, and application availability for the imprint process. Measurements of thermal properties using the TG method, TM-DSC method, and laser interferometric method were studied. From these measurements, it was found that the measurements of the thermally stable temperature, glass-transition temperature, and linear expansion coefficient of the resins were possible. Also, measurements of mechanical properties using the nano indentation were studied. In this method, the measurements of Young's modulus of the thin resin film on the substrate were possible. With respect to application availability for the imprint process, we investigated effects of the mold release treatment and their durability for two kinds of resins by measuring their adhesive force. It was observed that the difference in durability of mold release treatment effects depends on the resin type.
doi_str_mv 10.2494/photopolymer.18.531
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fullrecord <record><control><sourceid>proquest_cross</sourceid><recordid>TN_cdi_proquest_journals_1444633497</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>3107850001</sourcerecordid><originalsourceid>FETCH-LOGICAL-c535t-109c2d5ee7e2187dc20e39a99bc9a7d7a22ebd1964547bd51b2e9f4e3826363c3</originalsourceid><addsrcrecordid>eNplkF1LwzAUhoMoOKe_wJuC153NV7tcjqFuMFR08zak6emWkbU16Qb996ZUhuDNCYc8T87Ji9A9TiaECfbY7Oq2bmrbHcBN8HTCKb5AI0yZiFNK00s0SgRmsSCMXaMb7_dJQinnYoTUsjqBb81WtaauorqMZk1jjR7a2UkZq3JjTdv1d5uv-HW5ivIu2nhTbaNPOIFTNlp3DfgeeO8XifXRqdxC9AGBukVXpbIe7n7PMdo8P63ni3j19rKcz1ax5pS3MU6EJgUHyIDgaVZokgAVSohcC5UVmSIE8gKLlHGW5QXHOQFRMqBTktKUajpGD8O7jau_j-FPcl8fXRVGSswYCzkwkQWKDpR2tfcOStk4c1CukziRfZbyb5YST2XIMliLwdr7Vm3h7CjXGm3hn8OGEtQzonfKSajoD973hus</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>1444633497</pqid></control><display><type>article</type><title>Investigation of Application Availability of UV-NIL by Using Several Types of Photo-curable Resin</title><source>Full-Text Journals in Chemistry (Open access)</source><creator>Sakai, Nobuji ; Taniguchi, Jun ; Kawaguchi, Kenshi ; Ohtaguchi, Makoto ; Hirasawa, Tamano</creator><creatorcontrib>Sakai, Nobuji ; Taniguchi, Jun ; Kawaguchi, Kenshi ; Ohtaguchi, Makoto ; Hirasawa, Tamano</creatorcontrib><description>We prepared five kinds of photo-curable resins, and conducted evaluation experiments for their thermal properties, mechanical properties, and application availability for the imprint process. Measurements of thermal properties using the TG method, TM-DSC method, and laser interferometric method were studied. From these measurements, it was found that the measurements of the thermally stable temperature, glass-transition temperature, and linear expansion coefficient of the resins were possible. Also, measurements of mechanical properties using the nano indentation were studied. In this method, the measurements of Young's modulus of the thin resin film on the substrate were possible. With respect to application availability for the imprint process, we investigated effects of the mold release treatment and their durability for two kinds of resins by measuring their adhesive force. It was observed that the difference in durability of mold release treatment effects depends on the resin type.</description><identifier>ISSN: 0914-9244</identifier><identifier>EISSN: 1349-6336</identifier><identifier>DOI: 10.2494/photopolymer.18.531</identifier><language>eng</language><publisher>Hiratsuka: The Society of Photopolymer Science and Technology(SPST)</publisher><subject>Adhesive Force ; Glass-transition temperature ; Mold ; Photo-curable resin ; UV-nanoimprint</subject><ispartof>Journal of Photopolymer Science and Technology, 2005, Vol.18(4), pp.531-536</ispartof><rights>2005 The Society of Photopolymer Science and Technology (SPST)</rights><rights>Copyright Japan Science and Technology Agency 2005</rights><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c535t-109c2d5ee7e2187dc20e39a99bc9a7d7a22ebd1964547bd51b2e9f4e3826363c3</citedby><cites>FETCH-LOGICAL-c535t-109c2d5ee7e2187dc20e39a99bc9a7d7a22ebd1964547bd51b2e9f4e3826363c3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,780,784,27923,27924</link.rule.ids></links><search><creatorcontrib>Sakai, Nobuji</creatorcontrib><creatorcontrib>Taniguchi, Jun</creatorcontrib><creatorcontrib>Kawaguchi, Kenshi</creatorcontrib><creatorcontrib>Ohtaguchi, Makoto</creatorcontrib><creatorcontrib>Hirasawa, Tamano</creatorcontrib><title>Investigation of Application Availability of UV-NIL by Using Several Types of Photo-curable Resin</title><title>Journal of Photopolymer Science and Technology</title><addtitle>J. Photopol. Sci. Technol.</addtitle><description>We prepared five kinds of photo-curable resins, and conducted evaluation experiments for their thermal properties, mechanical properties, and application availability for the imprint process. Measurements of thermal properties using the TG method, TM-DSC method, and laser interferometric method were studied. From these measurements, it was found that the measurements of the thermally stable temperature, glass-transition temperature, and linear expansion coefficient of the resins were possible. Also, measurements of mechanical properties using the nano indentation were studied. In this method, the measurements of Young's modulus of the thin resin film on the substrate were possible. With respect to application availability for the imprint process, we investigated effects of the mold release treatment and their durability for two kinds of resins by measuring their adhesive force. It was observed that the difference in durability of mold release treatment effects depends on the resin type.</description><subject>Adhesive Force</subject><subject>Glass-transition temperature</subject><subject>Mold</subject><subject>Photo-curable resin</subject><subject>UV-nanoimprint</subject><issn>0914-9244</issn><issn>1349-6336</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2005</creationdate><recordtype>article</recordtype><recordid>eNplkF1LwzAUhoMoOKe_wJuC153NV7tcjqFuMFR08zak6emWkbU16Qb996ZUhuDNCYc8T87Ji9A9TiaECfbY7Oq2bmrbHcBN8HTCKb5AI0yZiFNK00s0SgRmsSCMXaMb7_dJQinnYoTUsjqBb81WtaauorqMZk1jjR7a2UkZq3JjTdv1d5uv-HW5ivIu2nhTbaNPOIFTNlp3DfgeeO8XifXRqdxC9AGBukVXpbIe7n7PMdo8P63ni3j19rKcz1ax5pS3MU6EJgUHyIDgaVZokgAVSohcC5UVmSIE8gKLlHGW5QXHOQFRMqBTktKUajpGD8O7jau_j-FPcl8fXRVGSswYCzkwkQWKDpR2tfcOStk4c1CukziRfZbyb5YST2XIMliLwdr7Vm3h7CjXGm3hn8OGEtQzonfKSajoD973hus</recordid><startdate>20050101</startdate><enddate>20050101</enddate><creator>Sakai, Nobuji</creator><creator>Taniguchi, Jun</creator><creator>Kawaguchi, Kenshi</creator><creator>Ohtaguchi, Makoto</creator><creator>Hirasawa, Tamano</creator><general>The Society of Photopolymer Science and Technology(SPST)</general><general>Japan Science and Technology Agency</general><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>7SR</scope><scope>7U5</scope><scope>8FD</scope><scope>JG9</scope><scope>L7M</scope></search><sort><creationdate>20050101</creationdate><title>Investigation of Application Availability of UV-NIL by Using Several Types of Photo-curable Resin</title><author>Sakai, Nobuji ; Taniguchi, Jun ; Kawaguchi, Kenshi ; Ohtaguchi, Makoto ; Hirasawa, Tamano</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c535t-109c2d5ee7e2187dc20e39a99bc9a7d7a22ebd1964547bd51b2e9f4e3826363c3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2005</creationdate><topic>Adhesive Force</topic><topic>Glass-transition temperature</topic><topic>Mold</topic><topic>Photo-curable resin</topic><topic>UV-nanoimprint</topic><toplevel>online_resources</toplevel><creatorcontrib>Sakai, Nobuji</creatorcontrib><creatorcontrib>Taniguchi, Jun</creatorcontrib><creatorcontrib>Kawaguchi, Kenshi</creatorcontrib><creatorcontrib>Ohtaguchi, Makoto</creatorcontrib><creatorcontrib>Hirasawa, Tamano</creatorcontrib><collection>CrossRef</collection><collection>Electronics &amp; Communications Abstracts</collection><collection>Engineered Materials Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Materials Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Journal of Photopolymer Science and Technology</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Sakai, Nobuji</au><au>Taniguchi, Jun</au><au>Kawaguchi, Kenshi</au><au>Ohtaguchi, Makoto</au><au>Hirasawa, Tamano</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Investigation of Application Availability of UV-NIL by Using Several Types of Photo-curable Resin</atitle><jtitle>Journal of Photopolymer Science and Technology</jtitle><addtitle>J. Photopol. Sci. Technol.</addtitle><date>2005-01-01</date><risdate>2005</risdate><volume>18</volume><issue>4</issue><spage>531</spage><epage>536</epage><pages>531-536</pages><issn>0914-9244</issn><eissn>1349-6336</eissn><abstract>We prepared five kinds of photo-curable resins, and conducted evaluation experiments for their thermal properties, mechanical properties, and application availability for the imprint process. Measurements of thermal properties using the TG method, TM-DSC method, and laser interferometric method were studied. From these measurements, it was found that the measurements of the thermally stable temperature, glass-transition temperature, and linear expansion coefficient of the resins were possible. Also, measurements of mechanical properties using the nano indentation were studied. In this method, the measurements of Young's modulus of the thin resin film on the substrate were possible. With respect to application availability for the imprint process, we investigated effects of the mold release treatment and their durability for two kinds of resins by measuring their adhesive force. It was observed that the difference in durability of mold release treatment effects depends on the resin type.</abstract><cop>Hiratsuka</cop><pub>The Society of Photopolymer Science and Technology(SPST)</pub><doi>10.2494/photopolymer.18.531</doi><tpages>6</tpages><oa>free_for_read</oa></addata></record>
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source Full-Text Journals in Chemistry (Open access)
subjects Adhesive Force
Glass-transition temperature
Mold
Photo-curable resin
UV-nanoimprint
title Investigation of Application Availability of UV-NIL by Using Several Types of Photo-curable Resin
url http://sfxeu10.hosted.exlibrisgroup.com/loughborough?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-08T18%3A24%3A01IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Investigation%20of%20Application%20Availability%20of%20UV-NIL%20by%20Using%20Several%20Types%20of%20Photo-curable%20Resin&rft.jtitle=Journal%20of%20Photopolymer%20Science%20and%20Technology&rft.au=Sakai,%20Nobuji&rft.date=2005-01-01&rft.volume=18&rft.issue=4&rft.spage=531&rft.epage=536&rft.pages=531-536&rft.issn=0914-9244&rft.eissn=1349-6336&rft_id=info:doi/10.2494/photopolymer.18.531&rft_dat=%3Cproquest_cross%3E3107850001%3C/proquest_cross%3E%3Cgrp_id%3Ecdi_FETCH-LOGICAL-c535t-109c2d5ee7e2187dc20e39a99bc9a7d7a22ebd1964547bd51b2e9f4e3826363c3%3C/grp_id%3E%3Coa%3E%3C/oa%3E%3Curl%3E%3C/url%3E&rft_id=info:oai/&rft_pqid=1444633497&rft_id=info:pmid/&rfr_iscdi=true