Positive Ion/Molecule Reactions in Tetrafluoroethylene

Gas-phase ion/molecule reactions in tetrafluoroethylene (C2F4) were studied with a pulsed electron beam mass spectrometer. When a few Torr of major gas, N2, containing 1-10 mTorr C2F4 was ionized by 2 keV electrons, CF3+ and C2F4+ were formed as major ions. CF3+ reacted with C2F4 rapidly to form C3F...

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Bibliographic Details
Published in:Journal of the Mass Spectrometry Society of Japan 2005, Vol.53(6), pp.315-317
Main Authors: MOCHIZUKI, Noritaka, WADA, Akira, OKADA, Hiroshi, ICHIKAWA, Toshiyasu, YAZAWA, Isao, ASAKAWA, Daiki, HIRAOKA, Kenzo
Format: Article
Language:English
Subjects:
Chemical ionization
Etching gas
Ion/molecule reaction
Rate constant
Tetrafluoroethylene
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Summary:Gas-phase ion/molecule reactions in tetrafluoroethylene (C2F4) were studied with a pulsed electron beam mass spectrometer. When a few Torr of major gas, N2, containing 1-10 mTorr C2F4 was ionized by 2 keV electrons, CF3+ and C2F4+ were formed as major ions. CF3+ reacted with C2F4 rapidly to form C3F7+. The rate constant of reaction C2F4++C2F4→C3F5++CF3 was measured to be (1.5±0.5)×10-11 cm3/molecule·s and found to be temperature-independent in the range of 180-310 K.
ISSN:1340-8097
1880-4225
DOI:10.5702/massspec.53.315