Probing Depth Study of Conversion Electron/He Ion Yield XAFS Spectroscopy on Strontium Titanate Thin Films

The probing depth of conversion electron/He ion yield XAFS methods has been studied in order to apply these methods to estimate the local distortion of strontium titanate thin films on thick substrates. Several strontium titanate thin film samples with different thicknesses were prepared and the edg...

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Bibliographic Details
Published in:Analytical Sciences 1999, Vol.15(3), pp.255-258
Main Authors: YANASE, Etsuya, WATANABE, Iwao, HARADA, Makoto, TAKAHASHI, Masao, DAKE, Yoshinori, HIROSHIMA, Yasushi
Format: Article
Language:English
Subjects:
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Dielectric thin films
Dielectrics, piezoelectrics, and ferroelectrics and their properties
Exact sciences and technology
Physics
Strontium
Thin films
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Summary:The probing depth of conversion electron/He ion yield XAFS methods has been studied in order to apply these methods to estimate the local distortion of strontium titanate thin films on thick substrates. Several strontium titanate thin film samples with different thicknesses were prepared and the edge-jump amplitudes at both the Sr and Ti K-edges were obtained. The probing depths were estimated to be 300 nm for the Sr K-edge and 30 nm for the Ti K-edge by the conventional exponential fit. The XAFS spectra and the probing depths measured by conversion electron and He ion yield methods is much the same, though the background curves are different.
ISSN:0910-6340
1348-2246
DOI:10.2116/analsci.15.255